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lab:presentations:2015:eurocvd
20th Biennial European Conference on Chemical Vapor Deposition (eurocvd) (Sempach, Switzerland, July 13-17)
- [7/?] Reactivity of Silicon Nitride Surface Sites with Silicon Chloride Precursors during Atomic Layer Deposition
Luchana L. Yusup, Jae-Min Park, Sora Park, Young-Kyun Kwon, and Won-Jun Lee
lab/presentations/2015/eurocvd.txt · Last modified: 2015/09/01 11:36 (external edit)
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