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lab:presentations:2014:ictf
16th International Conference on Thin Films (ICTF16) (Dubrovnik, Croatia, Octorber 13-16)
- [10/13] Density Functional Theory Study of Silicon Precursors for Atomic Layer Deposition of Silicon Nitride
Luchana L. Yusup, J-M Park, S Park, Y-K Kwon, S-J Kim, and Won-Jun Lee
lab/presentations/2014/ictf.txt · Last modified: 2015/01/08 23:24 (external edit)
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