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lab:presentations:2014:ald
14th International Conference on Atomic Layer Deposition (ALD 2014) (Kyoto, Japan, June 15-18)
- [6/16] Density Functional Theory Study of Silicon Nitride ALD Using Silicon Chloride Precursors
Luchana L. Yusup, J-M Park, S-J Woo, S Park, Y-K Kwon, S-J Kim, and Won-Jun Lee
lab/presentations/2014/ald.txt · Last modified: 2015/01/08 23:12 (external edit)
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