20th Biennial European Conference on Chemical Vapor Deposition (eurocvd) (Sempach, Switzerland, July 13-17)
[7/?] Reactivity of Silicon Nitride Surface Sites with Silicon Chloride Precursors during Atomic Layer Deposition
Luchana L. Yusup, Jae-Min Park, Sora Park, Young-Kyun Kwon, and Won-Jun Lee