16th International Conference on Thin Films (ICTF16) (Dubrovnik, Croatia, Octorber 13-16)
[10/13] Density Functional Theory Study of Silicon Precursors for Atomic Layer Deposition of Silicon Nitride
Luchana L. Yusup, J-M Park, S Park, Y-K Kwon, S-J Kim, and Won-Jun Lee