14th International Conference on Atomic Layer Deposition (ALD 2014) (Kyoto, Japan, June 15-18)
[6/16] Density Functional Theory Study of Silicon Nitride ALD Using Silicon Chloride Precursors
Luchana L. Yusup, J-M Park, S-J Woo, S Park, Y-K Kwon, S-J Kim, and Won-Jun Lee